515.654.81 - Introduction to Micro- and Nano-fabrication

Course Structure

The course materials are divided into modules which can be accessed by clicking Modules on the menu. A module will have several sections including the overview, content, readings, discussions, and assignments. You are encouraged to preview all sections of the module before starting. Most modules run for a period of seven (7) days, exceptions are noted in the Course Outline. You should regularly check the Calendar and Announcements for assignment due dates. 

Course Topics

• Cleanroom Etiquette and Safety
• General Fabrication Overview and Scaling
• Solid State Materials
• Photolitho-Graphy
• Vacuum Systems
• Etching (Dry/Wet)
• Film Deposition (Oxidation, Vapor)
• Introduction to Semiconductor Physics
  
• Introduction to E/M and Optical Devices
• Microscopy
• Characterization Tools
  

Course Goals

The goal of the course is to present the student with all the tools and knowledge necessary to conduct their work/research in a cleanroom micro/nano fabrication environment. This course will introduce the student to many areas of expertise that rely on micro fabrication and will give the student experience performing independent scientific literature searches. 

Course Learning Outcomes (CLOs)

• Critically evaluate scientific publications in micro/nano- fabrication and the exploitation of scaling to extremely small dimensions.
• Pass an initial clean room safety certification and adhere to applicable laws and regulations in the clean room.
• Explain inner workings of a cleanroom facility as well as the tools commonly available in a fabrication lab.
• Design a fabrication process for 2D or 3D structures with gained knowledge of crystal growth, photolithography, film deposition, etching, and characterization methods.
• Evaluate the fabricated product by implementing the proper characterization methods.

Textbooks

Required 

Campbell, S. A. (2012). Fabrication engineering at the micro- and nanoscale (4th ed.). Oxford University Press.

ISBN-13: 978-0199861224 

ISBN-10: 0199861226 

Textbook information for this course is available online through the appropriate bookstore website: For online courses, search the MBS website. 

Optional

Jaeger, R.C. (2001). Introduction to microelectronic fabrication: Volume 5 of Modular series on solid state devices (2nd ed.), (G. W. Neudeck and R.F. Pierret Eds.). Pearson. 

ISBN-13: 978-0201444940 

ISBN-10: 0201444941

Madou, M.J. (2002). Fundamentals of microfabrication: The science of miniaturization (2nd ed.). CRC Press.

ISBN-13: 978-0849308260 

ISBN-10: 0849308267 

Petersen, K.E. (1982). Silicon as mechanical material. Proceedings of IEEE, 70(5), 420-457. Available from https://ieeexplore-ieee-org.proxy1.library.jhu.edu/stamp/stamp.jsp?tp=&arnumber=1456599.

Williams, E. D., Ayres, R. U., & Heller, M. (2002). The 1.7 kilogram microchip: Energy and material use in the production of semiconductor devices. Environmental science & technology, 36(24), 5504-5510. Available from https://pubs-acs-org.proxy1.library.jhu.edu/doi/full/10.1021/es025643o.

Required Software

LabVIEW 

You will need access to LabVIEW to do optional extra credit assignments, a systems engineering software for applications that require test, measurement, and control with rapid access to hardware and data insights. As a student, you will be able to download a copy of LabVIEW from the Whiting School of Engineering software page. If you have a windows machine, here’s how: 

If you are on the Homewood campus network, simply navigate to the JHU WSE Software Downloads page and download the LabVIEW program. 

If you are not able to download the version on the Homewood campus network then you must get VPN access. In order to do this please navigate to myJHU and scroll down to the technology tab. The second to last link is labeled “The Johns Hopkins VPN Resource Center”. From here you can follow instructions to enroll in AZURE MFA and download the VPN software. Once you have successfully obtained the VPN you will be able to access the software at the JHU WSE Software Site. 

Please note the download is for windows only. If you need to use a Mac there is a 30-day trial version for this, however this may not be long enough. Please contact me immediately and we will speak with WSE help desk to see if we can get a Mac version.

MATLAB 

It will be very helpful to have access to a recent version of MATLAB. A license is provided at no cost to you, through JHU.

Visit the JHU IT Services Portal. Log in with your JHED ID and type “Matlab” in the search bar. Click on “Matlab for Students” in the search results and follow the instructions provided.

Student Coursework Requirements

It is expected that each module will take approximately 7–10 hours per week to complete. Here is an approximate breakdown: reading the assigned sections of the texts (approximately 2–3 hours per week) as well as some outside reading, listening to the audio annotated slide presentations (approximately 2–3 hours per week), and writing and homework assignments (approximately 3–4 hours per week). 

This course will consist of the following basic student requirements: 

Discussions (20% of Final Grade Calculation) 

You are responsible for carefully reading all assigned material and being prepared for discussion. The majority of readings are from the course text. Additional reading may be assigned to supplement text readings. 

You are responsible for posting a scientific article for each week that pertains to the topic of the current Module and write a short, critical review. Post your initial topic by the evening of day 3 for that module week. Posting a discussion topic is part one of your grade for module discussions (i.e., Timeliness). 

Part two of your grade for module discussion is your interaction (i.e., responding to classmate postings with thoughtful responses) with at least two classmate’s topics (i.e., Critical Thinking). Just posting your response to a discussion question is not sufficient; we want you to interact with your classmates. Be detailed in your postings and in your responses to your classmates' postings. Feel free to agree or disagree with your classmates. Please ensure that your postings are civil and constructive.

I will monitor module discussions and will respond to some of the discussions as discussions are posted. Evaluation of preparation and participation is based on contribution to discussions.

Preparation and participation is evaluated by the following grading elements:

1. Timeliness (50%)
2. Critical Thinking (50%)

Preparation and participation is graded as follows:

• 100–90 = A
  • Timeliness - regularly participates; all required postings; early in discussion; throughout the discussion
  • Critical Thinking - rich in content; full of thoughts, insight, and analysis
• 89–80 = B
  • Timeliness - frequently participates; all required postings; some not in time for others to read and respond
  • Critical Thinking - substantial information; thought, insight, and analysis has taken place
• 79–70 = C
  • Timeliness - infrequently participates; all required postings; most at the last minute without allowing for response time
  • Critical Thinking - generally competent; information is thin and commonplace
• <70 = F
  • Timeliness - rarely participates; some, or all required postings missing
  • Critical Thinking - rudimentary and superficial; no analysis or insight is displayed

Assignments (30% of Final Grade Calculation) 

Assignments will include a mix of qualitative and quantitative problem sets. Include a cover sheet with your name and assignment identifier. Also include your name and a page number indicator (i.e., page x of y) on each page of your submissions. Each problem should have the problem statement, assumptions, computations, and conclusions/discussion delineated. All Figures and Tables should be captioned and labeled appropriately.

All assignments are due according to the dates in the Calendar.

Late submissions will be reduced by one letter grade for each week late (no exceptions without prior coordination with the instructors).

Qualitative assignments are evaluated by the following grading elements:

1. Each part of question is answered (20%)
2. Writing quality and technical accuracy (30%) (Writing is expected to meet or exceed accepted graduate-level English and scholarship standards. That is, all assignments will be graded on grammar and style as well as content).
3. Rationale for answer is provided (20%)
4. Examples are included to illustrate rationale (15%) (If you do not have direct experience related to a particular question, then you are to provide analogies versus examples).
5. Outside references are included (15%)

Qualitative assignments are graded as follows:

• 100–90 = A, All parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References are rich in content; full of thought, insight, and analysis.
• 89–80 = B, All parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References provide substantial information; thought, insight, and analysis has taken place.
• 79–70=C, Majority of parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References are generally competent; information is thin and commonplace.
• <70=F, Some parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References are rudimentary and superficial; no analysis or insight displayed.

Quantitative assignments are evaluated by the following grading elements:

1. Each part of question is answered (20%)
2. Assumptions are clearly stated (20%)
3. Intermediate derivations and calculations are provided (25%)
4. Answer is technically correct and is clearly indicated (25%)
5. Answer precision and units are appropriate (10%)

Quantitative assignments are graded as follows:

• 100–90 = A, All parts of the question are addressed; All assumptions are clearly stated; All intermediate derivations and calculations are provided; Answer is technically correct and is clearly indicated; Answer precision and units are appropriate.
• 89–80 = B, All parts of the question are addressed; All assumptions are clearly stated; Some intermediate derivations and calculations are provided; Answer is technically correct and is indicated; Answer precision and units are appropriate.
• 79–70=C, Most parts of the question are addressed; Assumptions are partially stated; Few intermediate derivations and calculations are provided; Answer is not technically correct but is indicated; Answer precision and units are indicated but inappropriate.
• <70=F, Some parts of the question are addressed; Assumptions are not stated; Intermediate derivations and calculations are not provided; The answer is incorrect or missing; The answer precision and units are inappropriate or missing.

Midterm Exam (25% of Final Grade Calculation)

The midterm exam will be available during the week of Module 8. You will have the time of one class period to complete the exam which will be open note/open book.

The Midterm Exam is evaluated by the following grading elements:

1. Each part of question is answered (20%)
2. Writing quality and technical accuracy (30%) (Writing is expected to meet or exceed accepted graduate- level English and scholarship standards. That is, all assignments will be graded on grammar and style as well as content.)
3. Rationale for answer is provided (20%)
4. Examples are included to illustrate rationale (15%) (If a student does not have direct experience related to a particular question, then the student is to provide analogies versus examples.)
5. Outside references are included (15%)

The midterm contains 83 possible points, however the grading scale will be out of 100. The number of points out of 83 will be converted to base 100 by a simple division. For example 73 points on the midterm will be 73/83 = 87.95/100. The Midterm is then graded as follows:

• 100–90 = A, All parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References are rich in content; full of thought, insight, and analysis.
• 89–80 = B, All parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References provide substantial information; thought, insight, and analysis has taken place.
• 79–70 = C, Majority of parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References are generally competent; information is thin and commonplace.
• <70 = F, Some parts of the question are addressed; Writing Quality/Rationale/Examples/Outside References are rudimentary and superficial; no analysis or insight displayed.

Final Research Project (25% of Final Grade Calculation)

For the Final Research Project you will record a 15-minute presentation of a critical literature review of a topic of study relevant to the course. In a Final Research Project Discussion, you will collaborate with your peers about the recordings. You will also, submit a 5-10-page report on the subject including a critical interpretation of results and many references. The last week will be devoted to the final project presentation.

The Final Research project is evaluated by the following grading elements:

1. Student preparation and participation (as described in Course Project Description) (40%) 
2. Student technical understanding of the course project topic (as related to individual role that the student assumes and described in the Course Project Description) (20%) 
3. Team preparation and participation (as described in Course Project Description) (20%)
4. Team technical understanding of the course project topic (as related to the Customer Team roles assumed by the students and the Seller Team roles assumed by the students and described in the Course Project Description) (20%)

The Final Research Project is graded as follows:

• 100–90 = A, Student Preparation and Participation/ Team Preparation and Participation [individual/ team roles and responsibilities well defined and understood; individual/ team well versed in use of Zoom; individual/ team work product(s) agreed to, well prepared and available to all team members/ instructors]; Student Understanding/ Team Understanding [rich in content; full of thought, insight, and analysis].
• 89–80 = B, Student Preparation and Participation/ Team Preparation and Participation [individual/ team roles and responsibilities well defined and understood; individual/ team well versed in use of Zoom; individual/ team work product(s) agreed to and prepared]; Student Understanding/ Team Understanding [substantial information; thought, insight, and analysis has taken place].
• 79–70 = C, Student Preparation and Participation/ Team Preparation and Participation [individual/ team roles and responsibilities agreed to; individual/ team well versed in use of Zoom; individual/ team work product(s) prepared]; Student Understanding/ Team Understanding [generally competent; information is thin and commonplace].
• <70 = F, Student Preparation and Participation/ Team Preparation and Participation [individual/ team roles and responsibilities not well understood; individual/ team has difficult with use of Zoom; individual/ team work product(s) partially prepared]; Student Understanding/ Team Understanding [rudimentary and superficial; no analysis or insight displayed]. 

Extra Credit (5% of Final Grade Calculation)

Two optional LabVIEW assignments will be available in case you wish to work towards extra credit. The first LabVIEW assignment will be due during the first half of the course and the second will be due by the end of the course. LabVIEW resources will be available and LabVIEW tutorials will be continually assigned as part of your homework in order to help familiarize you with the program.

Grading Policy

Assignments are due according to the dates posted in your Canvas course site. You may check these due dates in the Course Calendar or the Assignments in the corresponding modules. I will post grades one week after assignment due dates. 

We generally do not directly grade spelling and grammar. However, egregious violations of the rules of the English language will be noted without comment. Consistently poor performance in either spelling or grammar is taken as an indication of poor written communication ability that may detract from your grade. 

A grade of A indicates achievement of consistent excellence and distinction throughout the course—that is, conspicuous excellence in all aspects of assignments and discussion in every week.

A grade of B indicates work that meets all course requirements on a level appropriate for graduate academic work. These criteria apply to both undergraduates and graduate students taking the course.

EP uses a +/- grading system (see “Grading System”, Graduate Programs catalog, p. 10).

Academic Policies

Deadlines for Adding, Dropping and Withdrawing from Courses

Students may add a course up to one week after the start of the term for that particular course. Students may drop courses according to the drop deadlines outlined in the EP academic calendar (https://ep.jhu.edu/student-services/academic-calendar/). Between the 6th week of the class and prior to the final withdrawal deadline, a student may withdraw from a course with a W on their academic record. A record of the course will remain on the academic record with a W appearing in the grade column to indicate that the student registered and withdrew from the course.

Academic Misconduct Policy

All students are required to read, know, and comply with the Johns Hopkins University Krieger School of Arts and Sciences (KSAS) / Whiting School of Engineering (WSE) Procedures for Handling Allegations of Misconduct by Full-Time and Part-Time Graduate Students.

This policy prohibits academic misconduct, including but not limited to the following: cheating or facilitating cheating; plagiarism; reuse of assignments; unauthorized collaboration; alteration of graded assignments; and unfair competition. Course materials (old assignments, texts, or examinations, etc.) should not be shared unless authorized by the course instructor. Any questions related to this policy should be directed to EP’s academic integrity officer at ep-academic-integrity@jhu.edu.

Students with Disabilities - Accommodations and Accessibility

Johns Hopkins University values diversity and inclusion. We are committed to providing welcoming, equitable, and accessible educational experiences for all students. Students with disabilities (including those with psychological conditions, medical conditions and temporary disabilities) can request accommodations for this course by providing an Accommodation Letter issued by Student Disability Services (SDS). Please request accommodations for this course as early as possible to provide time for effective communication and arrangements.

For further information or to start the process of requesting accommodations, please contact Student Disability Services at Engineering for Professionals, ep-disability-svcs@jhu.edu.

Student Conduct Code

The fundamental purpose of the JHU regulation of student conduct is to promote and to protect the health, safety, welfare, property, and rights of all members of the University community as well as to promote the orderly operation of the University and to safeguard its property and facilities. As members of the University community, students accept certain responsibilities which support the educational mission and create an environment in which all students are afforded the same opportunity to succeed academically. 

For a full description of the code please visit the following website: https://studentaffairs.jhu.edu/policies-guidelines/student-code/

Classroom Climate

JHU is committed to creating a classroom environment that values the diversity of experiences and perspectives that all students bring. Everyone has the right to be treated with dignity and respect. Fostering an inclusive climate is important. Research and experience show that students who interact with peers who are different from themselves learn new things and experience tangible educational outcomes. At no time in this learning process should someone be singled out or treated unequally on the basis of any seen or unseen part of their identity. 
 
If you have concerns in this course about harassment, discrimination, or any unequal treatment, or if you seek accommodations or resources, please reach out to the course instructor directly. Reporting will never impact your course grade. You may also share concerns with your program chair, the Assistant Dean for Diversity and Inclusion, or the Office of Institutional Equity. In handling reports, people will protect your privacy as much as possible, but faculty and staff are required to officially report information for some cases (e.g. sexual harassment).

Course Auditing

When a student enrolls in an EP course with “audit” status, the student must reach an understanding with the instructor as to what is required to earn the “audit.” If the student does not meet those expectations, the instructor must notify the EP Registration Team [EP-Registration@exchange.johnshopkins.edu] in order for the student to be retroactively dropped or withdrawn from the course (depending on when the "audit" was requested and in accordance with EP registration deadlines). All lecture content will remain accessible to auditing students, but access to all other course material is left to the discretion of the instructor.